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GAMA Series Systems |
E200 Systems |
94XX Systems |
AWP Systems |
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Various Software Upgrades |
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ICE-1™ Chemical Concentration Control for increased process consistency |
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Peroxide Concentration Monitoring for extended bath life |
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Extended Bath Life for Phosphoric Nitride Etch Process |
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Chemical Injection in Rinse Tanks for Increased Process Capability |
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LuCID3™ IPA Dryer module
reduces IPA costs |
Liquid Level Enhancement
Improves Safety |
GreenDry™ for High A.R Features |
IPA Concentration Monitoring |
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Auto Lids for High Temp
Acid/Solvent Tanks |
Enhanced Gripper Wash
Nozzle improves COO |
Quick Clean Teflon® End Effector with cost efficient Enhanced Gripper Wash Nozzles |
IPA Vaporizer System
eliminates water marks |
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Single Filtration for re-circulated systems reduces COO |
Single Filtration |
Single Filtration |
Half Space Processing (100 wafers) reduces COO |
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Process Carrier upgrades |
Product Detect Sensors minimize chance for scrap |
Product Detect Sensor |
Face-to-Face Processing eliminates "first wafer issue" |
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N2 Level Sensors for high temp processes |
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DynaFlow Rinse Tanks improve COO & rinse efficiency |
Tool PC Upgrade with state-of-the-art PC and 32 bit software |
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Thermoelectric Heat Exchangers reduce power consumption, enhance performance |
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Thermoelectric Heat Exchanger |
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White Knight pumps for enhanced reliability and cost savings |
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White Knight Pumps |
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Halogen In-line Heating Systems save COO |
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High Temp SMC Universal manifold improves safety |
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On-line Uninterruptible Power Supply |
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Robot Motor Controller Upgrade |
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