Alert 8.4 October 17, 2017


In this issue


Letís talk process implementation

GAMA wet stations for Si Etch for MEMS manufacturing or other processes using tetramethylammonium hydroxide (TMAH)

Click here for more information.


Information about replacing stainless steel solvent tanks in GAMA wet stations built before 2017Ö.

Click here for more information.


Click here for current replacement parts list..

Akrion Systems proactively keeps you informed about obsolete parts so that you can maintain your fab's capabilities and productivity. If you have questions please contact your local sales or service personnel.

Please note these links:

Urgent, Critical or Emergency Situations (Formal Response Within 24 Hours):

The latest update to the comprehensive list of obsolete parts is always available as an Excel or PDF download on the spare parts page at

Spare Parts Return/Repair Information, Inquiries & Purchase Orders: or
by FAX: 1-484-229-0725

Spare Parts Order/Inquiry Form: Order Form

Stay up to date with the latest Software notes and Technical Bulletins from Customer Support, sign up for access.† Click on the Customer Portal link at the top of the Home Page.

Coming Soon: We will be announcing a new customer portal experience with additional materials including software notes.



Product Alert is published by Akrion Systems.†
Copyright © Akrion Systems LLC 2017.† All rights reserved.